Most of the 13.56 MHz plasma generators operate under class E (switched mode operation) in order to achieve very high efficiency. The new STAC150V2-350E was specifically designed for this type of class E operation and is able to deliver 500 W under 150 V supply thanks to its high drain – source breakdown voltage greater than 700 V. This device can withstand a load mismatch of 65:1 in all phases and is housed in STAC177 package.