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Environmental Sensors Roadmap Slide 5
ST’s pressure sensors exploit their innovative patented VENSEN process technology to realize a mono-crystalline silicon membrane over a sealed cavity. The VENSEN process enables a thinner, robust, and low-cost sensing element than using a conventional bulk micromachining technology. A wheatstone bridge piezo-resistive configuration is diffused on the mono substrate to measure the pressure applied on the membrane. With VENSEN, the device is highly robust against over-pressure, high-shock, and angular displacement due to the thin cavity and low mass of the membrane. Competitive parts are constructed differently and most are  not capable of withstanding extreme overpressure situations.
PTM Published on: 2014-03-18