Slide 1 Slide 2 Slide 3 Slide 4 Slide 5 Slide 6 Slide 7 Slide 8 Slide 9 Slide 10 Slide 11 Slide 12 Slide 13 Slide 14 Slide 15 Slide 16 Slide 17 Slide 18 Slide 19 Slide 20 Slide 21 Slide 22 Slide 23 Product List
MEMS Gyroscopes Slide 3

To achieve a very high level of integration, ST uses a System-in-Package approach where the ASIC die is stacked on top of the MEMS structure to address applications where small size is a key constraint. The MEMS sensor is composed of a mass which is kept in a continuous oscillating movement so that it reacts to the Coriolis effect when an angular rate is applied to the device. A CMOS ASIC measures the angular rate of the MEMS element relative to the external world and delivers an analog output voltage proportional to that rate.

PTM Published on: 2011-09-07