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The heart of the MEMS microphone is the acoustic sensor. The acoustic sensor uses a fixed plate and a moveable diaphragm to detect sound waves. Sound waves cause a change in pressure, causing the diaphragm to move, resulting in a change in capacitance between the diaphragm and the fixed plate. This change in capacitance is measured and converted into an electrical signal by a CMOS interface IC.
PTM Published on: 2013-11-18
