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KEMET’s multilayer piezoelectric actuators play an indispensable role in the semiconductor manufacturing because they combine high performance and high reliability. In addition to being used for mass flow controllers mounted on film-forming equipment and etching processing equipment, they are also used for lithography systems, wafer inspection equipment, and wire bonders. However, they are not just limited to semiconductor manufacturing; industrial applications are also in high demand of such high precision and quick response time. X-Y stages, air valves, dispensers, atomic force microscopes, micro manipulators, and analytical measurement equipment are just some examples within the industrial environment. Furthermore, consumer type applications are also looking for such highly reliable actuators, using them for autofocus of single-lens reflex cameras. Such applications require high alignment accuracy and high-speed operation, and KEMET's laminated piezoelectric actuators contribute to the high performance of these devices.

PTM Published on: 2021-12-07