Honeywell Zephyr™ Airflow Sensors are designed to measure mass the flow of air and other non-corrosive gases based on the heat transfer principle. These sensors use a thermally isolated heater and temperature sensing elements that help provide a fast response to the air or gas flow. Honeywell Zephyr™ Airflow Sensors consist of MEMS devices with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a carefully designed precision airflow channel to provide repeatable response to flow.