In summary, the Honeywell Zephyr™ Airflow Sensors are designed to provide enhanced functionality driven by performance requirements. They offer customers six unique advantages for airflow sensors, including Total Error Band accuracy, an airflow range from ±50 SCCM to ±750 SCCM, configurability, stability, low pressure drop, and a linear output. These sensors use a thermally isolated heater and temperature sensing elements to provide a fast response to the air or gas flow. Honeywell Zephyr™ Airflow Sensors consist of MEMS devices with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a carefully designed precision airflow channel to provide repeatable response to flow. The Zephyr sensors offer bidirectional flow sensing capabilities which eliminates the need to have multiple sensors to detect airflow in both directions. To facilitate mounting the sensor in a space-constrained area the devices are not sensitive to mounting orientation.