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By lowering the TCR requirements to ±100 ppm/°C and absolute resistance tolerance requirements to ±1%, the thin film materials can be optimized for lower cost and higher power while maintaining superior low-noise, high-stability, and low-parasitic properties. Also, the sputtering process was scaled up and moved in-line, which is usually separate from the rest of the high speed low cost chip manufacturing equipment.
PTM Published on: 2011-09-06
PTM Updated on: 2018-01-12