SiTime’s innovative Elite Platform™ delivers exceptional dynamic performance that is resilient to environmental stressors such as shock, vibration, and fast temperature transients. Underpinning the Elite Platforms are SiTime’s unique DualMEMS™ temperature sensing architecture and TurboCompensation™ technologies. DualMEMS is a noiseless temperature compensation scheme. It consists of two MEMS resonators fabricated on the same die substrate. The TempFlat™ resonator is designed with a flat frequency characteristic over temperature, whereas the temperature sensing resonator is by design sensitive to temperature changes. The ratio of frequencies between these two resonators provides an accurate reading of the resonator temperature with 20μK resolution. By placing the two MEMS resonators on the same die, this temperature sensing scheme eliminates any thermal lag and gradients between resonator and temperature sensor, thereby overcoming an inherent weakness of legacy quartz TCXOs.