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MEMS is an acronym for Micro Electro Mechanical Systems. These devices contain micrometer sized mechanical components and electronic circuitry on a single chip. MEMS devices have their origins in the semiconductor industry. Where ICs are two dimensional, MEMS are 3-D with a fabrication process similar to ICs. MEMS are very small systems, generally 1 to 100 micrometers in size.
PTM Published on: 2011-12-07
