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"Q MEMS" was coined by combining “Quartz" with "MEMS." Whereas MEMS are fabricated on silicon, Q MEMS are fabricated on quartz. Here, too, MEMS micro-fabrication processes like photolithography, etching, and metallization are used to produce extremely small, yet high performance quartz crystal devices for the demanding timing applications.
PTM Published on: 2011-06-02
